Double-ended Fizeau interferometers with phase-stepping evaluation for measurement of cubes

R. Arnold Nicolaus; Chu-Shik Kang; Gerhard Boensch

doi:10.1117/12.323098

30 September 1998 Double-ended Fizeau interferometers with phase-stepping evaluation for measurement of cubes

R. Arnold Nicolaus, Chu-Shik Kang, Gerhard Boensch

Proceedings Volume 3477, Recent Developments in Optical Gauge Block Metrology; (1998) https://doi.org/10.1117/12.323098
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

Double-ended Fizzeau type interferometers can be applied advantageously for direct dimensional measurements of regular bodies with parallel, flat measuring surfaces. At PTB, such an interferometer with specific equipment for phase stepping interferometry has been developed. The basic interferometer or etalon consists of two parallel, semi- reflecting reference plates. The symmetrical arrangement of two optical systems for illumination and observation of the interference pattern allows alternating measurements from both sides. The interference systems are observed in reflection and focused onto CCD-cameras. The optical pates are attached to a rigid frame, so that both an adjustment of the interference and a parallel displacement for the phase stepping technique is obtained. Servo-control units allow a precise value of 1/4 interference order for the displacement to be adjusted, which is necessary for a special Fizzeau algorithm. The dimensions of the interferometer are designed for volume measurements of cubes of about 80 mm, which are used as density standards. The distance topography between two opposed surfaces of the cubes are derived from measurements of the empty etalon and measurements with the cube inserted. The interferometer can also measure gauge blocks which are not wrung to a base plate by direct optical probing of the free surfaces and explore the influence of roughness and optical phase shift.

Citation Download Citation

R. Arnold Nicolaus, Chu-Shik Kang, and Gerhard Boensch "Double-ended Fizeau interferometers with phase-stepping evaluation for measurement of cubes", Proc. SPIE 3477, Recent Developments in Optical Gauge Block Metrology, (30 September 1998); https://doi.org/10.1117/12.323098

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