Rapid prototyping using excimer laser microfabrication system

Ashok Krishnan; Raja Nassar

doi:10.1117/12.324082

1 September 1998 Rapid prototyping using excimer laser microfabrication system

Ashok Krishnan, Raja Nassar

Proceedings Volume 3512, Materials and Device Characterization in Micromachining; (1998) https://doi.org/10.1117/12.324082
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

To demonstrate proof of concept and obtain faster turnaround times on prototype development, an integrated excimer laser microfabrication system can be used for direct drawing-to- production of photoablated microstructures. A system currently in use consists of excimer lasers (248 nm and 351 nm), high- resolution stages, CAD system, and a visual observation and real-time metrology system. The material for the process is selected depending on the required edge wall definition, aspect ratio, surface roughness, and debris formation and ablation threshold. If the material is already defined, then the best process is found by selecting the following parameters: (1) machining feedrate, (2) laser pulse characteristics, (3) beam defocus, (4) number of passes, (5) laser aided cleaning, (6) high velocity gas cleaning, (7) vacuum machining. Some of the structures fabricated include microtube holders incorporating snap-fasteners for click-on microassembly. Where necessary, laser ablation is complemented by other micromachining processes like micromilling.

Citation Download Citation

Ashok Krishnan and Raja Nassar "Rapid prototyping using excimer laser microfabrication system", Proc. SPIE 3512, Materials and Device Characterization in Micromachining, (1 September 1998); https://doi.org/10.1117/12.324082

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