Microstructured silicon substrate for low-power multi-gas-sensor applications

Heinz-Georg Dura; W. Mokwa; J. Werno

doi:10.1117/12.333740

18 December 1998 Microstructured silicon substrate for low-power multi-gas-sensor applications

Heinz-Georg Dura, W. Mokwa, J. Werno

Proceedings Volume 3539, Chemical Microsensors and Applications; (1998) https://doi.org/10.1117/12.333740
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States

Abstract

Multi gas sensor systems are often the only way for increasing selectivity of a gas measurement in a given environment. It is shown that the cycled heating of sensor membranes give the possibility for quantitative analysis of gas mixtures. In addition the integration of several thermally decoupled sensor elements with different gas sensitivities on one silicon chip is possible. On the other hand for hand held devices low power consumption is necessary. In this paper we present results on a microstructured silicon substrate with different gas sensors, each placed on a thermally insulated silicon membrane, optimized for cycled heating.

Citation Download Citation

Heinz-Georg Dura, W. Mokwa, and J. Werno "Microstructured silicon substrate for low-power multi-gas-sensor applications", Proc. SPIE 3539, Chemical Microsensors and Applications, (18 December 1998); https://doi.org/10.1117/12.333740

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