Changes in optical properties of excimer-laser-irradiated polymers

Bela Hopp; Zsuzsanna Marton; Maria Csete; Ferenc Ignacz; Zsolt Bor

doi:10.1117/12.320985

19 August 1998 Changes in optical properties of excimer-laser-irradiated polymers

Bela Hopp, Zsuzsanna Marton, Maria Csete, Ferenc Ignacz, Zsolt Bor

Proceedings Volume 3573, OPTIKA '98: 5th Congress on Modern Optics; (1998) https://doi.org/10.1117/12.320985
Event: OPTIKA '98: Fifth Congress on Modern Optics, 1998, Budapest, Hungary

Abstract

Nanosecond resolution measurements were performed to investigate the change of reflectivity of polymers (PolyMethylMethacrylate and PolyImide) under ArF excimer laser irradiation. The temperature increase due to the irradiation was also calculated. From the results of the experiments and calculations we concluded that several processes influence the observed changes in optical properties of the irradiated polymer samples, such as the quickly expanding gas that leaves the surface immediately after the incidence of the excimer pulse, thermal decomposition of the surface layer and the decrease of the refractive index caused by the heat.

Citation Download Citation

Bela Hopp, Zsuzsanna Marton, Maria Csete, Ferenc Ignacz, and Zsolt Bor "Changes in optical properties of excimer-laser-irradiated polymers", Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); https://doi.org/10.1117/12.320985

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