Hollow fiber delivery of ArF and KrF excimer laser light

Yuji Matsuura; Mitsunobu Miyagi

doi:10.1117/12.346704

21 April 1999 Hollow fiber delivery of ArF and KrF excimer laser light

Yuji Matsuura, Mitsunobu Miyagi

Proceedings Volume 3596, Specialty Fiber Optics for Medical Applications; (1999) https://doi.org/10.1117/12.346704
Event: BiOS '99 International Biomedical Optics Symposium, 1999, San Jose, CA, United States

Abstract

For delivery of ArF and KrF excimer laser light, a hollow fiber composed of a glass capillary tube and an aluminum thin film on the inside was proposed. A thin aluminum film is deposited by metal-organic chemical vapor deposition employing dimethylethylamine alane as the source material. Measured loss spectra in vacuum-UV and UV regions and measured losses for ArF-excimer laser light show the low loss property of the aluminum-coated fiber at both of the ArF and KrF excimer laser light. The straight loss of 1-m long, 1-mm bore fiber was 1.0 dB for ArF and 0.4 dB for KrF excimer lasers.

Citation Download Citation

Yuji Matsuura and Mitsunobu Miyagi "Hollow fiber delivery of ArF and KrF excimer laser light", Proc. SPIE 3596, Specialty Fiber Optics for Medical Applications, (21 April 1999); https://doi.org/10.1117/12.346704

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