High-power ultraviolet all-solid-state laser for industrial applications

Christoph Mehlmann; Thomas Schroeder; Peter Klopp; R. Koch; Uwe Stamm; Dirk Basting

doi:10.1117/12.352701

15 July 1999 High-power ultraviolet all-solid-state laser for industrial applications

Christoph Mehlmann, Thomas Schroeder, Peter Klopp, R. Koch, Uwe Stamm, Dirk Basting

Proceedings Volume 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV; (1999) https://doi.org/10.1117/12.352701
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

A diode-pumped laser system is described operating at 1 Hz-7 kHz repetition frequency. Average powers of more than 5 W at 355 nm are achieved. With it is beam quality of M² better than 1.1 it is excellently suitable for micro- machining applications generating smaller spot sizes with rather simple imaging system. Laser parameters such as pulse duration, average power as well as energy stability are investigated. Long term test results above 4.0 X 10¹⁰ shots are presented.

Citation Download Citation

Christoph Mehlmann, Thomas Schroeder, Peter Klopp, R. Koch, Uwe Stamm, and Dirk Basting "High-power ultraviolet all-solid-state laser for industrial applications", Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); https://doi.org/10.1117/12.352701

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