Progress in SiC membrane for x-ray mask

Tsutomu Shoki; Akinori Kurikawa; Takamitsu Kawahara; Tadashi Sakurai

doi:10.1117/12.360243

25 August 1999 Progress in SiC membrane for x-ray mask

Tsutomu Shoki, Akinori Kurikawa, Takamitsu Kawahara, Tadashi Sakurai

Proceedings Volume 3748, Photomask and X-Ray Mask Technology VI; (1999) https://doi.org/10.1117/12.360243
Event: Photomask and X-Ray Mask Technology VI, 1999, Yokohama, Japan

Abstract

In 1992, we began development of SiC membranes for X-ray masks using a prototype LPCVD system. A production type LPCVD system had been newly designed to provide significant improvements in film uniformity and achieved high productivity. SiC films of 2 micrometer in thickness produced by the new system showed uniform thickness distribution of plus or minus 0.6% in an area of 50 mm in diameter, and uniform stress of plus or minus 1% in an area of 25 mm square. SiC films in the suitable stress range of 100 to 350 MPa in tensile, with excellent thickness repeatability of plus or minus 0.06 micrometer, have been produced by the optimized process. SiC membrane of 3 micrometer in thickness, which are more effective for obtaining precise masks, showed uniformity similar to the membrane of 2 micrometer in thickness.

Citation Download Citation

Tsutomu Shoki, Akinori Kurikawa, Takamitsu Kawahara, and Tadashi Sakurai "Progress in SiC membrane for x-ray mask", Proc. SPIE 3748, Photomask and X-Ray Mask Technology VI, (25 August 1999); https://doi.org/10.1117/12.360243

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available