Two-wave x-ray methods for characterization of supersmooth substrates and thin films

Alexander V. Vinogradov; Igor V. Pirshin; Alexander G. Touryanski; Rouslan M. Fechtchenko

doi:10.1117/12.370090

16 November 1999 Two-wave x-ray methods for characterization of supersmooth substrates and thin films

Alexander V. Vinogradov, Igor V. Pirshin, Alexander G. Touryanski, Rouslan M. Fechtchenko

Proceedings Volume 3773, X-Ray Optics Design, Performance, and Applications; (1999) https://doi.org/10.1117/12.370090
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

X-ray reflectometry is usually applied for determination of optical constant of materials on the basis of measurements of angular dependent reflectivity. New reflectometry methods based on measurements of either the derivatives with respect to the grazing angle or the ratios of reflection coefficients for two characteristic wavelengths are suggested in present paper. Calculations and measurements indicate that the method suggested makes it possible to enhance the sensitivity of reflectometry and the accuracy of measuring optical constants. Practical implementation of the method is based on the original system of selecting the monochromatic beams with the use of semitransparent crystals. The results of reflectometry studies of GaAs monocrystals and a Ga_0.25Si_0.75-Si multilayer structure on a Si substrate are reported.

Citation Download Citation

Alexander V. Vinogradov, Igor V. Pirshin, Alexander G. Touryanski, and Rouslan M. Fechtchenko "Two-wave x-ray methods for characterization of supersmooth substrates and thin films", Proc. SPIE 3773, X-Ray Optics Design, Performance, and Applications, (16 November 1999); https://doi.org/10.1117/12.370090

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