Design and manufacturing of active-matrix organic light-emitting microdisplays on silicon

Karl Pichler; Webster E. Howard; Olivier Prache

doi:10.1117/12.372718

17 December 1999 Design and manufacturing of active-matrix organic light-emitting microdisplays on silicon

Karl Pichler, Webster E. Howard, Olivier Prache

Proceedings Volume 3797, Organic Light-Emitting Materials and Devices III; (1999) https://doi.org/10.1117/12.372718
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

An organic light-emitting diode (OLED) microdisplay is described. The OLED display has a top-emitting structure integrated on single-crystal active-matrix driver chips and is sealed in a fully hermetic package. All processing and fabrication is done on 8-in. wafers until final dicing and assembly. The basic structure of the displays, the key manufacturing and processing steps, and initial performance of a monochrome green active-matrix OLED device structure are presented. Key advantages of the chosen approach as well as remaining challenges and requirements for improvements are discussed.

Citation Download Citation

Karl Pichler, Webster E. Howard, and Olivier Prache "Design and manufacturing of active-matrix organic light-emitting microdisplays on silicon", Proc. SPIE 3797, Organic Light-Emitting Materials and Devices III, (17 December 1999); https://doi.org/10.1117/12.372718

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