Excimer laser fabrication of low-cost diffractive optical prototypes for CO2 laser marking applications

Manuel Flury; Jean-Guy Fontaine; Philippe Gerard; Thierry Engel

doi:10.1117/12.364225

20 September 1999 Excimer laser fabrication of low-cost diffractive optical prototypes for CO₂ laser marking applications

Manuel Flury, Jean-Guy Fontaine, Philippe Gerard, Thierry Engel

Author Affiliations +

Proceedings Volume 3822, Computer-Controlled Microshaping; (1999) https://doi.org/10.1117/12.364225
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany

Abstract

We present a novel use of micro-machining with excimer laser: realization of reflective diffractive optical elements (DOE) for laser marking. The DOE's design is first calculated using the standard Gerchberg-Saxton algorithm associated with optimization procedures. The design takes into account the following parameters for the diffraction efficiency optimization: incident beam angle, M² quality factor and the modulation transfer function of the fabrication process. We consider here two phase levels elements in Fourier and Fresnel configurations. The fabrication process makes use of excimer laser ablation. We demonstrate the transfer of this design on different materials with two cases: direct and indirect substrate etching.

Citation Download Citation

Manuel Flury, Jean-Guy Fontaine, Philippe Gerard, and Thierry Engel "Excimer laser fabrication of low-cost diffractive optical prototypes for CO₂ laser marking applications", Proc. SPIE 3822, Computer-Controlled Microshaping, (20 September 1999); https://doi.org/10.1117/12.364225

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available