Fabrication of plastic microparts on wafer level

Lutz Weber; Wolfgang Ehrfeld; Marc Begemann; Udo Berg; Frank Michel

doi:10.1117/12.361226

30 August 1999 Fabrication of plastic microparts on wafer level

Lutz Weber, Wolfgang Ehrfeld, Marc Begemann, Udo Berg, Frank Michel

Proceedings Volume 3874, Micromachining and Microfabrication Process Technology V; (1999) https://doi.org/10.1117/12.361226
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

In the recent years micromolding has become one of the most important key technologies of microengineering. At the current state of art, the mass fabrication of plastic microparts for a wide range of applications like telecommunications, sensors, medical technology and biochemistry is feasible. Here a micro motor, plastic optical waveguides, a micro pump, and nanotiterplates are presented.

Citation Download Citation

Lutz Weber, Wolfgang Ehrfeld, Marc Begemann, Udo Berg, and Frank Michel "Fabrication of plastic microparts on wafer level", Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999); https://doi.org/10.1117/12.361226

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