Dissolution of indium arsenide in HNO3-HBr-H2O and Br2-HBr solutions

Z. F. Tomashik; S. G. Danylenko; V. N. Tomashik

doi:10.1117/12.368403

4 November 1999 Dissolution of indium arsenide in HNO₃-HBr-H₂O and Br₂-HBr solutions

Z. F. Tomashik, S. G. Danylenko, V. N. Tomashik

Proceedings Volume 3890, Fourth International Conference on Material Science and Material Properties for Infrared Optoelectronics; (1999) https://doi.org/10.1117/12.368403
Event: Material Science and Material Properties for Infrared Optoelectronics, 1998, Kiev, Ukraine

Abstract

The InAs dissolution in HNO₃-HBr-H₂O and Br₂-HBr solutions is investigated. The surface of equal etching rates is constructed and the process limiting stages of dissolution depending on a size of a ratio in such solutions are determined. The kinetics of InAs dissolution in Br₂- HBr solutions is investigated. The solution region which can be used for chemicodynamic polishing of InAs is determined.

Citation Download Citation

Z. F. Tomashik, S. G. Danylenko, and V. N. Tomashik "Dissolution of indium arsenide in HNO₃-HBr-H₂O and Br₂-HBr solutions", Proc. SPIE 3890, Fourth International Conference on Material Science and Material Properties for Infrared Optoelectronics, (4 November 1999); https://doi.org/10.1117/12.368403

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