Theoretical studies of AlGaAs-GaAs multiple-quantum-well single-channel waveguide defined by ion-implantation-induced intermixing

Hon Fai Chu; Wai-Chee Shui

doi:10.1117/12.391415

14 July 2000 Theoretical studies of AlGaAs-GaAs multiple-quantum-well single-channel waveguide defined by ion-implantation-induced intermixing

Hon Fai Chu, Wai-Chee Shui

Author Affiliations +

Proceedings Volume 3944, Physics and Simulation of Optoelectronic Devices VIII; (2000) https://doi.org/10.1117/12.391415
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

A simple and accurate model is presented for the analysis of ion-implanted AlGaAs-GaAs multiple-quantum-well (MQW) single channel waveguide. Our model proposed that the interdiffusion is vacancy enhanced. So we simulate the interdiffusion mechanism by solving the coupled diffusion equation of vacancy and interdiffusion numerically. The modal propagation constants full width half-maximum (FWHM) and field profiles of the guided modes of the waveguide are solved numerically using a semi-vectorial wave equation. MQW optical waveguides defined by ion-implantation-induced intermixing are shown to have similar optical properties as conventional dielectric rib optical waveguide. They also provide a more flexible control over the waveguiding characteristics by changing parameters such as periods of MQW layers, mask width, ion implant energy, and diffusion time.

Citation Download Citation

Hon Fai Chu and Wai-Chee Shui "Theoretical studies of AlGaAs-GaAs multiple-quantum-well single-channel waveguide defined by ion-implantation-induced intermixing", Proc. SPIE 3944, Physics and Simulation of Optoelectronic Devices VIII, (14 July 2000); https://doi.org/10.1117/12.391415

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available