Two-axis-scattering laser Doppler vibrometer for microstructures

Bryan Kok Ann Ngoi; Krishnan Venkatakrishnan; Beng Heok Tan; N. Noel; Zuowei Shen; C. S. Chin

doi:10.1117/12.386754

22 May 2000 Two-axis-scattering laser Doppler vibrometer for microstructures

Bryan Kok Ann Ngoi, Krishnan Venkatakrishnan, Beng Heok Tan, N. Noel, Zuowei Shen, C. S. Chin

Proceedings Volume 4072, Fourth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; (2000) https://doi.org/10.1117/12.386754
Event: 4th International Conference on Vibration Measurement by Laser Techniques, 2000, Ancona, Italy

Abstract

In this paper, a two-axis-scanning Laser Doppler Vibrometer for micro-scale object dynamic behavior characterization is described. The system employs a two-axis acousto-optic deflectors and a telecentric lens to achieve high-precision and high-speed scanning. The newly developed vibrometer was used to measure the dynamic behavior of an entire AFM cantilever operated in free air. The 120 micrometers long, 25 micrometers wide micro-cantilever dynamic response was measured at different positions with 2 micrometers spatial resolution.

Citation Download Citation

Bryan Kok Ann Ngoi, Krishnan Venkatakrishnan, Beng Heok Tan, N. Noel, Zuowei Shen, and C. S. Chin "Two-axis-scattering laser Doppler vibrometer for microstructures", Proc. SPIE 4072, Fourth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2000); https://doi.org/10.1117/12.386754

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