Effect of stress on silicon oxynitride optical waveguides

Yitao Sun; K. A. McGreer; James N. Broughton

doi:10.1117/12.406401

15 December 2000 Effect of stress on silicon oxynitride optical waveguides

Yitao Sun, K. A. McGreer, James N. Broughton

Proceedings Volume 4087, Applications of Photonic Technology 4; (2000) https://doi.org/10.1117/12.406401
Event: 2000 International Conference on Application of Photonic Technology (ICAPT 2000), 2000, Quebec City, Canada

Abstract

An integrated optical demultiplexer is an ideal device for the measurement of the effect of strain (or, equivalently, stress) on birefringence. We fabricated optical demultiplexers from silicon oxynitride optical waveguides and measured the strain dependence of the passband wavelengths. From the shift in the passband wavelength, we determined the strain dependence of the effective index for the silicon oxynitride waveguide.

Citation Download Citation

Yitao Sun, K. A. McGreer, and James N. Broughton "Effect of stress on silicon oxynitride optical waveguides", Proc. SPIE 4087, Applications of Photonic Technology 4, (15 December 2000); https://doi.org/10.1117/12.406401

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