Hole drilling of glass substrates with a slab waveguide CO2 laser

Yoshikazu Yoshida; Yuji Kobayashi; Tiejun Zhang; Hiroyoshi Yajima; Yuji Hashidate; Hiroshi Ogura

doi:10.1117/12.405747

6 November 2000 Hole drilling of glass substrates with a slab waveguide CO₂ laser

Yoshikazu Yoshida, Yuji Kobayashi, Tiejun Zhang, Hiroyoshi Yajima, Yuji Hashidate, Hiroshi Ogura

Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405747
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan

Abstract

Using 30-1000 (mu) s pulses and 9.3 (mu) m wavelength from a CO₂ slab waveguide laser, focused to a spot size of 130 (mu) m, we have produced holes in synthetic quartz, soda-lime glass, and Pyrex glass substrates. In the three types of substrates, the mass removal per pulse increases almost linearly with the pulse energy used to vary the pulse interval. The removal rates of the three substrates are almost the same. We examine the effect of the pulse interval on the hole structure and the pile-up around the hole in single- and multiple-pulse hole drilling. The deformation on the pile-up region can be accounted by the melting walls of the hole. Moreover, we examine the effect of pulse energy on the inclination of the hole walls. A multiple-pulse hole shaping technique is effective in decreasing the height coefficient of the pile-up region and the angle of inclination.

Citation Download Citation

Yoshikazu Yoshida, Yuji Kobayashi, Tiejun Zhang, Hiroyoshi Yajima, Yuji Hashidate, and Hiroshi Ogura "Hole drilling of glass substrates with a slab waveguide CO₂ laser", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405747

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available