Recording of 0.1-um minimum mark size in a new phase-change media

Hiroshi Miura; Yoshitaka Hayashi; Shunsuke Fujita; Koji Ujiie; Kiyoshi Yokomori

doi:10.1117/12.399336

18 September 2000 Recording of 0.1-μm minimum mark size in a new phase-change media

Hiroshi Miura, Yoshitaka Hayashi, Shunsuke Fujita, Koji Ujiie, Kiyoshi Yokomori

Proceedings Volume 4090, Optical Data Storage 2000; (2000) https://doi.org/10.1117/12.399336
Event: Optical Data Storage, 2000, Whistler, BC, Canada

Abstract

The shapes of phase-change marks on surface recording discs with a Substrate/Ag/lower ZnS-SiO₂/AgInSbTe/upper ZnS- SiO₂ layered structure were investigated by scanning electron microscopy (SEM). When the upper ZnS-SiO₂ layer was removed by a wet chemical process, the marks were clearly observed as dark contrast in the secondary-electron image mode. The SEM observation showed that the mark size could be reduced to around 0.1 micrometers in the tangential direction. The mark shapes were crescents, and fluctuation with scaling down was hardly visible. Uniform 0.1 micrometers marks made on surface recording discs which use AgInSbTe will allow an increase in disc capacity.

Citation Download Citation

Hiroshi Miura, Yoshitaka Hayashi, Shunsuke Fujita, Koji Ujiie, and Kiyoshi Yokomori "Recording of 0.1-μm minimum mark size in a new phase-change media", Proc. SPIE 4090, Optical Data Storage 2000, (18 September 2000); https://doi.org/10.1117/12.399336

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