Varied-line-spacing laminar-type holographic grating for the standard soft x-ray flat-field spectrograph

Masato Koike; Takeshi Namioka; Eric M. Gullikson; Yoshihisa Harada; Sadayuki Ishikawa; Takashi Imazono; Stanley Mrowka; Noboru Miyata; Mihiro Yanagihara; James H. Underwood; Kazuo Sano; Tokuo Ogiwara; Osamu Yoda; Shiro Nagai

doi:10.1117/12.406669

8 November 2000 Varied-line-spacing laminar-type holographic grating for the standard soft x-ray flat-field spectrograph

Masato Koike, Takeshi Namioka, Eric M. Gullikson, Yoshihisa Harada, Sadayuki Ishikawa, Takashi Imazono, Stanley Mrowka, Noboru Miyata, Mihiro Yanagihara, James H. Underwood, Kazuo Sano, Tokuo Ogiwara, Osamu Yoda, Shiro Nagai

Author Affiliations +

Proceedings Volume 4146, Soft X-Ray and EUV Imaging Systems; (2000) https://doi.org/10.1117/12.406669
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

An aspheric wave-front recording system was designed to produce a holographic grating for use in a standard soft X- ray flat field spectrograph interchangeable with a mechanically ruled varied-line-spacing (VLS) grating. The grating grooves recorded with the designed aspheric wave- front recording system were processed to form a laminar groove profile by means of reactive ion etching. Measurements done with synchrotron radiation and a laboratory X-ray source are reported for this laminar-type grating and a commercial grating replicated from a mechanically ruled VLS grating that was specifically designed and fabricated for the standard soft X-ray flat- field spectrography. The laminar-type holographic grating is found to have an absolute first-order efficiency of approximately 10% for wavelengths of approximately 4.5 - 12 nm. It is also shown that the holographic grating is effective in suppressing the higher orders and stray-light level for soft X-ray of 4.36 nm (C-K) and has a comparable spectral resolution to the replica VLS grating.

Citation Download Citation

Masato Koike, Takeshi Namioka, Eric M. Gullikson, Yoshihisa Harada, Sadayuki Ishikawa, Takashi Imazono, Stanley Mrowka, Noboru Miyata, Mihiro Yanagihara, James H. Underwood, Kazuo Sano, Tokuo Ogiwara, Osamu Yoda, and Shiro Nagai "Varied-line-spacing laminar-type holographic grating for the standard soft x-ray flat-field spectrograph", Proc. SPIE 4146, Soft X-Ray and EUV Imaging Systems, (8 November 2000); https://doi.org/10.1117/12.406669

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available