Discolored bondpads caused by aluminum hydroxide formation

Zong Min Wu; Chong Khiam Oh; Soh Ping Neo; Shailesh Redkar

doi:10.1117/12.410086

23 August 2000 Discolored bondpads caused by aluminum hydroxide formation

Zong Min Wu, Chong Khiam Oh, Soh Ping Neo, Shailesh Redkar

Proceedings Volume 4182, Process Control and Diagnostics; (2000) https://doi.org/10.1117/12.410086
Event: Microelectronic Manufacturing, 2000, Santa Clara, CA, United States

Abstract

Discolored bondpads and poor adhesion or non-stick failure during bonding was investigated. The bondpads looked either brown in color at corners or just discolored without brownish corners. SEM inspection showed such bondpads had porous surface that was worse at corners. EDX, FIB and Auger Electron Spectroscopy (AES) were used to analyze and identify the root cause. Failure analysis showed that the discolored bondpads were caused by the formation of aluminum hydroxide. This process was an oxidation or corrosion process that could not be avoided when bondpads were exposed to atmospheric environment. EDX analysis further confirmed the existence of Al-O chemical bonding. FIB/SEM analysis showed clearly the porous layer grew thicker towards the bondpad edge by consuming more aluminum. The layer of aluminum hydroxide on the bondpads created a barrier for good bonding. It is the responsibility of both fab and assembly plant to take preventative action to avoid the excessive exposure of bondpads to moisture during manufacturing.

Citation Download Citation

Zong Min Wu, Chong Khiam Oh, Soh Ping Neo, and Shailesh Redkar "Discolored bondpads caused by aluminum hydroxide formation", Proc. SPIE 4182, Process Control and Diagnostics, (23 August 2000); https://doi.org/10.1117/12.410086

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available