Wide-range and high-resolution displacement measurement with grating

Haibao Lu; Juliang Cao; Jianyun Chen

doi:10.1117/12.403902

10 October 2000 Wide-range and high-resolution displacement measurement with grating

Haibao Lu, Juliang Cao, Jianyun Chen

Proceedings Volume 4222, Process Control and Inspection for Industry; (2000) https://doi.org/10.1117/12.403902
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

A new method of displacement measurement using single grating is put forward in the paper. Wide range and high-resolution displacement measurement is realized by means of a general coarse metric-grating and a spectroscope. The method solves the traditional problem that high frequency grating can't be manufactured too long. The optical configuration and the principle of measurement are presented in the paper. Its feasibility is proved by experiment. In the experiment, a metric-grating with frequency of 50 rulings/mm is used and optical subdivision more than 32 is received.

Citation Download Citation

Haibao Lu, Juliang Cao, and Jianyun Chen "Wide-range and high-resolution displacement measurement with grating", Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); https://doi.org/10.1117/12.403902

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