Calibration of frequency response function for a phase-shifted interferometer

Zhishan Gao; Jinbang Chen

doi:10.1117/12.402837

6 October 2000 Calibration of frequency response function for a phase-shifted interferometer

Zhishan Gao, Jinbang Chen

Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402837
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China

Abstract

There is very strong need to test mid-frequency power spectrum density (PSD) for optical surface used in high power laser system, aerospace high resolution camera, astronomy optical system, and X-ray optics, etc. To improve measurement accuracy and remove the error, the calibration of frequency response function for a phase-shifted interferometer must be done before PSD is tested by this interferometer. In this paper, the intensity function contributed by three plane-waves interference is given at first. On basis of this function, the sinusoidal phase grating with variable frequency formed by two plane-waves interference with appropriate ratio of two amplitudes is discussed and is used to calibrate the frequency response function of an interferometer. A test example is given and some error sources are pointed out and studied.

Citation Download Citation

Zhishan Gao and Jinbang Chen "Calibration of frequency response function for a phase-shifted interferometer", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); https://doi.org/10.1117/12.402837

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