Beam-shaping application in laser heat processing

Si Lu; Deer Yi; Yingbai Yan; Lin Pang; Guofan Jin; Minxian Wu

doi:10.1117/12.432540

29 June 2001 Beam-shaping application in laser heat processing

Si Lu, Deer Yi, Yingbai Yan, Lin Pang, Guofan Jin, Minxian Wu

Proceedings Volume 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI; (2001) https://doi.org/10.1117/12.432540
Event: Photonics West 2001 - LASE, 2001, San Jose, CA, United States

Abstract

Beam-shaping plays a very important role in the field of laser processing. Laser quench needs a rectangular speckle, which has a flat top, steep sides, high efficiency and low sidelobes. Diffractive phase elements (DPEs) have many superexcellent characters, which conventional optical elements have difficulties to achieve. Designing of the phase plane comes down to phase retrieval problem. Geometrical transformation and multiform iterative algorithms, such as G-S algorithm, Input-Output algorithm, ST algorithm are adopted. Through comparison of the results from different methods, some evaluations about algorithms are made. ST algorithm is the most feasible method for the problem, the result of which can meet the requirements of practical process. Some simulation experiments and discussions about algorithms have been done. To be fabricated as a binary optical element (BOE), the result of design has been quantified to 16 steps.

Citation Download Citation

Si Lu, Deer Yi, Yingbai Yan, Lin Pang, Guofan Jin, and Minxian Wu "Beam-shaping application in laser heat processing", Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); https://doi.org/10.1117/12.432540

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