Polysilicon TFT on plastics

Tatsuya Shimoda; Satoshi Inoue; Sumio Utsunomiya

doi:10.1117/12.424888

30 April 2001 Polysilicon TFT on plastics

Tatsuya Shimoda, Satoshi Inoue, Sumio Utsunomiya

Proceedings Volume 4295, Flat Panel Display Technology and Display Metrology II; (2001) https://doi.org/10.1117/12.424888
Event: Photonics West 2001 - Electronic Imaging, 2001, San Jose, CA, United States

Abstract

A novel technology that makes it possible to transfer thin film devices from an original substrate to the other one by using laser ablation/annealing has been developed. This technology is named SUFTLA which stands for surface free technology by laser ablation/annealing. In the process of this technology, polycrystalline-silicon thin film transistors and TAFT circuits, which are firstly fabricated by the low-temperature process below 425 degrees C on quartz or glass substrates, are transferred onto plastic substrates. Any degradation during the transfer process are not observed. By using this technology, CMOS ring oscillators and a TAFT array with integrated drivers for LCD have been developed on plastic substrates and their compete operations were confirmed. This technology is not only applied for displays such as LCD and OELD, but also to any kinds of TAFT circuits including memories and logics on plastics. It also enable us to fabricate a 3D ICs with a very simple manner.

Citation Download Citation

Tatsuya Shimoda, Satoshi Inoue, and Sumio Utsunomiya "Polysilicon TFT on plastics", Proc. SPIE 4295, Flat Panel Display Technology and Display Metrology II, (30 April 2001); https://doi.org/10.1117/12.424888

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