Paper
23 April 2001 Failure analysis of advanced packaging technologies using scanning acoustic microscopy
John J. Barton, Anthony Compagno, Cian O'Mathuna
Author Affiliations +
Abstract
In recent years, scanning acoustic microscopy (SAM) has been found to be a very successful technique when used in the microelectronics industry to evaluate, from a reliability perspective, standard plastic packaging technologies such as PQFP's, PLCC's, DIP's and SOP's. The recent explosion of advanced packaging techniques such as Chip-on-Board, Flip-chip and BGA and the proliferation of Microsystems has further widened the arena of what constitutes microelectronics. With such a wide breadth of devices from standard plastic packages to state-of-the-art microsystems, it is difficult to find a failure analysis technique which can cope competently with that scope. SAM is one such technique. This paper will demonstrate the effectiveness of SAM at non-destructively analyzing a range of advanced packaging technologies from integrated passive to flip-chip to microsystems.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John J. Barton, Anthony Compagno, and Cian O'Mathuna "Failure analysis of advanced packaging technologies using scanning acoustic microscopy", Proc. SPIE 4406, In-Line Characterization, Yield, Reliability, and Failure Analysis in Microelectronic Manufacturing II, (23 April 2001); https://doi.org/10.1117/12.425281
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Acoustics

Semiconducting wafers

Capacitors

Microscopy

Transducers

Silicon

Packaging

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