Electrothermal modeling of silicon PCR chips

Zheng Cui; Zhan Zhao; Shanhong Xia

doi:10.1117/12.425312

30 April 2001 Electrothermal modeling of silicon PCR chips

Zheng Cui, Zhan Zhao, Shanhong Xia

Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425312
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

Polymerase chain reaction (PCR) on a microchip has drawn considerable attention in recent years. Although a microchip can have must fast heating and cooling rate, the delicacy in its structure makes the PCR experiment difficult and cracks often occurs particularly for the thin membrane type of PCR chips. Electrothermal modeling of PCR chips is presented using commercial MEMS software tool IntelliSuite^TM, with the aim of identifying the problems encountered in experiment and finding an optimum chip structure. Heating characteristics of four different heater designs have been compared, so have the PCR chambers with fixed frame and with suspended frame. The thermal stress analysis has shown that the structure and heater design can make significant difference in heating characteristics and in reducing the failure of PCR chips. The computer simulation has confirmed what has been found in experiment the reason of membrane cracks. Improvement in PCR chip design has been proposed.

Citation Download Citation

Zheng Cui, Zhan Zhao, and Shanhong Xia "Electrothermal modeling of silicon PCR chips", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); https://doi.org/10.1117/12.425312

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