Two-plane-parallel fixed electrodes micromachined tunable oscillator

Yee Chong Loke; Ai Qun Liu; Kim Miao Liew; Q. Zou

doi:10.1117/12.425368

5 April 2001 Two-plane-parallel fixed electrodes micromachined tunable oscillator

Yee Chong Loke, Ai Qun Liu, Kim Miao Liew, Q. Zou

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425368
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

High frequency, micromechanical bandpass filter, with tunable frequency and bandwidth are demonstrated in a polysilicon surface micromachining technology. These filter utilized a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Damping effect was shown to have a significance factor in affecting the flat passband of the filter and will be further analyzed in this paper.

Citation Download Citation

Yee Chong Loke, Ai Qun Liu, Kim Miao Liew, and Q. Zou "Two-plane-parallel fixed electrodes micromachined tunable oscillator", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425368

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