Design of a rf-MEMS BAW filter using surface micromachining

Peng Cong; Yanxiang Liu; Tian-Ling Ren; Li-Tian Liu

doi:10.1117/12.440130

14 September 2001 Design of a rf-MEMS BAW filter using surface micromachining

Peng Cong, Yanxiang Liu, Tian-Ling Ren, Li-Tian Liu

Proceedings Volume 4414, International Conference on Sensor Technology (ISTC 2001); (2001) https://doi.org/10.1117/12.440130
Event: International Conference on Sensing units and Sensor Technology, 2001, Wuhan, China

Abstract

A novel structure of front end passband bulk acoustic wave (BAW) filter using surface micromachining in is designed. The advantages and disadvantages of fabricating BAW RF filter using surface and bulk micromachining are discussed. The analytical solutions of the wave equation for the electrode-piezoelectrics-electrode sandwich structure on support film in the BAW RF resonators are presented.

Citation Download Citation

Peng Cong, Yanxiang Liu, Tian-Ling Ren, and Li-Tian Liu "Design of a rf-MEMS BAW filter using surface micromachining", Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); https://doi.org/10.1117/12.440130

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