New method of weak frequency variation detection in silicon microresonator

Xiangyang Zhao; Junhua Liu; Baizhou Shi

doi:10.1117/12.440138

14 September 2001 New method of weak frequency variation detection in silicon microresonator

Xiangyang Zhao, Junhua Liu, Baizhou Shi

Proceedings Volume 4414, International Conference on Sensor Technology (ISTC 2001); (2001) https://doi.org/10.1117/12.440138
Event: International Conference on Sensing units and Sensor Technology, 2001, Wuhan, China

Abstract

It is needed to enhance sensitivity and resolving power in microresonators, which give weak frequency variation in perceiving pressure and temperature. The simulated extraction of weak frequency variation is carried out with the manifesting resonant frequency-locking property when system transits from chaotic to great periodic motion. With signal preprocessing used bandpass sampling and down sampling, measurement system is founded based on chaos. At the same time it is pointed out that the system can realize flexible measurement in silicon microresonators.

Citation Download Citation

Xiangyang Zhao, Junhua Liu, and Baizhou Shi "New method of weak frequency variation detection in silicon microresonator", Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); https://doi.org/10.1117/12.440138

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