Novel micro electromagnetic relay based on MEMS technology

Yufeng Zhang; Desheng Li; Donghong Wang

doi:10.1117/12.440232

14 September 2001 Novel micro electromagnetic relay based on MEMS technology

Yufeng Zhang, Desheng Li, Donghong Wang

Proceedings Volume 4414, International Conference on Sensor Technology (ISTC 2001); (2001) https://doi.org/10.1117/12.440232
Event: International Conference on Sensing units and Sensor Technology, 2001, Wuhan, China

Abstract

This paper presents a novel method for the fabrication of micro electromagnetic relays based on MEMS technology. Fabrication process and the partial test results are given in detail. Th emian advantages of the micro relay include small volume, low weight, rapid response, and longevity. In addition, it takes the performance between the common electromagnetic relay and the solid-state one, thus the proposed micro relay may be promising in the future.

Citation Download Citation

Yufeng Zhang, Desheng Li, and Donghong Wang "Novel micro electromagnetic relay based on MEMS technology", Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); https://doi.org/10.1117/12.440232

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