Theoretical study of surface MEMS rf switch structure

Ming Jia; Fangmin Guo; Ziqiang Zhu; Zongsheng Lai; Jianpeng Chu; Yaolin Wang; Xiaohong Ge; Yirong Yang

doi:10.1117/12.440199

14 September 2001 Theoretical study of surface MEMS rf switch structure

Ming Jia, Fangmin Guo, Ziqiang Zhu, Zongsheng Lai, Jianpeng Chu, Yaolin Wang, Xiaohong Ge, Yirong Yang

Proceedings Volume 4414, International Conference on Sensor Technology (ISTC 2001); (2001) https://doi.org/10.1117/12.440199
Event: International Conference on Sensing units and Sensor Technology, 2001, Wuhan, China

Abstract

We simulate the structure of surface MEMS RF switch by suing ANSYS electrostatic and mechanical energy coupled analysis with established models. In this paper actuation voltage for different geometrical scales of suspended beam contacted switch are discussed. The dependence of actuation voltage on the Yang's module, size of cantilever and electrode area is calculated.

Citation Download Citation

Ming Jia, Fangmin Guo, Ziqiang Zhu, Zongsheng Lai, Jianpeng Chu, Yaolin Wang, Xiaohong Ge, and Yirong Yang "Theoretical study of surface MEMS rf switch structure", Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); https://doi.org/10.1117/12.440199

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