Batch assembly microball lens array for Si-based optical coupling platform in free space

S.C. Shen; Chengtang Pan; Hwai-Pwu Chou; Yu Hsi Chao; Kun Lung Lin; Yang Jauh Jung

doi:10.1117/12.427078

8 May 2001 Batch assembly microball lens array for Si-based optical coupling platform in free space

S.C. Shen, Chengtang Pan, Hwai-Pwu Chou, Yu Hsi Chao, Kun Lung Lin, Yang Jauh Jung

Proceedings Volume 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001); (2001) https://doi.org/10.1117/12.427078
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '01), 2001, Yokohama, Japan

Abstract

The paper presents novel concepts of batch fabrication of micro-ball lens array technology integrated on the silicon based wafer by low temperature wafer bonding by which can improve appropriate distance of optical fiber coupling. The silicon based coupling platform consists of the self-parking framework, micro-ball lens array, and precision platform for optical fiber coupling purpose. The structure of optical platform is able to improve distance of between fiber and micro-ball lens and increase coupling efficiency. The micro- ball lens array is batch fabricated by polymeric material and melting photoresist through low temperature wafer bonding. Then batch assembly onto each other flat-topped mesa that adjoins to the v-groove. The corner compensation offers a method to fabricate self-parking framework and flat-topped mesa in the intersection of two v-grooves. This fabrication process not only provides accurate coupling distance between fibers and micro-ball lens but also reduces micro-assembly cost.

Citation Download Citation

S.C. Shen, Chengtang Pan, Hwai-Pwu Chou, Yu Hsi Chao, Kun Lung Lin, and Yang Jauh Jung "Batch assembly microball lens array for Si-based optical coupling platform in free space", Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); https://doi.org/10.1117/12.427078

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