Debris-free soft x-ray source with gas-puff target

Qiliang Ni; Bo Chen; Yan Gong; Jianlin Cao; Jingquan Lin; Hongyan Lee

doi:10.1117/12.449859

6 December 2001 Debris-free soft x-ray source with gas-puff target

Qiliang Ni, Bo Chen, Yan Gong, Jianlin Cao, Jingquan Lin, Hongyan Lee

Proceedings Volume 4502, Advances in Laboratory-based X-Ray Sources and Optics II; (2001) https://doi.org/10.1117/12.449859
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

We have been developing a debris-free laser plasma light source with a gas-puff target system whose nozzle is driven by a piezoelectric crystal membrane. The gas-puff target system can utilize gases such as CO₂, O₂ or some gas mixture according to different experiments. Therefore, in comparison with soft X-ray source using a metal target, after continuously several-hour laser interaction with gas from the gas-puff target system, no evidences show that the light source can produce debris. The debris-free soft X-ray source is prepared for soft X-ray projection lithography research at State Key Laboratory of Applied Optics. Strong emission from CO₂, O₂ and Kr plasma is observed.

Citation Download Citation

Qiliang Ni, Bo Chen, Yan Gong, Jianlin Cao, Jingquan Lin, and Hongyan Lee "Debris-free soft x-ray source with gas-puff target", Proc. SPIE 4502, Advances in Laboratory-based X-Ray Sources and Optics II, (6 December 2001); https://doi.org/10.1117/12.449859

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