Paper
7 January 2002 Improvement of spatial resolution in phase-contrast x-ray computed tomography
Atsushi Momose, Ichiro Koyama, Keiichi Hirano
Author Affiliations +
Abstract
Image quality of phase-contrast x-ray computed tomogram was evaluated by comparing tomograms obtained by using triple Laue-case x-ray interferometers with a thin or a thick crystal wafer. It was confirmed that the spatial resolution was improved when the wafer is thinned. A simulation study by means of the Takagi-Taupin equation was also carried out for theoretical understanding. According to the wavefront modulation transfer function calculated for Laue-case diffraction, it is suggested that using an interferometer with al thin wafer tends to improve image quality. However, a new problem is pointed out that the accuracy in quantitative measurement of high-frequency phase modulation is not secured even when the wafer is thinned.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Atsushi Momose, Ichiro Koyama, and Keiichi Hirano "Improvement of spatial resolution in phase-contrast x-ray computed tomography", Proc. SPIE 4503, Developments in X-Ray Tomography III, (7 January 2002); https://doi.org/10.1117/12.452871
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Cited by 2 scholarly publications.
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KEYWORDS
X-rays

Interferometers

Semiconducting wafers

Spatial resolution

Diffraction

Wavefronts

Modulation transfer functions

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