Paper
7 January 2002 Tomography with high resolution
Christoph Rau, Timm Weitkamp, Anatoly A. Snigirev, Christian G. Schroer, Boris Benner, Johannes Tuemmler, Til Florian Guenzler, Marion Kuhlmann, Bruno Lengeler, Carl E. Krill III, K. Doebrich, Daniel Michels, Andreas Michels
Author Affiliations +
Abstract
One major goal in x-ray tomography is to increase the resolution in space and time. For the methods with high temporal resolution we will present pink beam imaging and tomography. Experiments were realised at the ESRF undulator beamline ID22 with hard x-rays in the range from 11 keV to 20 keV. For the tomographic scans the exposure time per image was reduced by one to two orders of magnitude to less than 50 ms per image. The obtained image quality was comparable to that done with monochromatic beam. Further time reducing for a tomographic scan is possible with an improved acquiring and control system. The goal in the future is to realise tomographic scans within a minute with micrometer resolution. In order to achieve in the hard x-ray range sub-micrometer resolution we will show first results of x-ray magnified tomography. Different lens systems are available for this purpose. We obtained with aluminium parabolic compound refractive lenses a resolution of 1 micrometers and expect to overcome this limit hand in hand with the improvement of lens technology.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christoph Rau, Timm Weitkamp, Anatoly A. Snigirev, Christian G. Schroer, Boris Benner, Johannes Tuemmler, Til Florian Guenzler, Marion Kuhlmann, Bruno Lengeler, Carl E. Krill III, K. Doebrich, Daniel Michels, and Andreas Michels "Tomography with high resolution", Proc. SPIE 4503, Developments in X-Ray Tomography III, (7 January 2002); https://doi.org/10.1117/12.452849
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Cited by 7 scholarly publications.
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KEYWORDS
Tomography

X-rays

Mirrors

Aluminum

Silicon

Hard x-rays

Palladium

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