Display matrix of three-electrode active MDMDM elements

A. I. Vorobyova; E. A. Outkina

doi:10.1117/12.431263

28 June 2001 Display matrix of three-electrode active MDMDM elements

A. I. Vorobyova, E. A. Outkina

Proceedings Volume 4511, Advanced Display Technologies: Basic Studies of Problems in Information Display (FLOWERS 2000); (2001) https://doi.org/10.1117/12.431263
Event: Advanced Display Technologies: Basic Studies of Problems in Information Display (FLOWERS'2000), 2000, Moscow, Russian Federation

Abstract

The layout features of the developed display matrix of three-electrode active MDMDM-elements are represented. The design of the matrix includes the grid of orthogonal electrodes, at intersections of which the driving active elements are placed. The emitter layer is formed by vacuum deposition of Ta/Al films and subsequent selective electrochemical anodization using photoresistive mask. The conductive paths between the emitter and collector layers are formed as Ta₂O₅ anodic oxide pillars of 100 to 600 nm height and 30 to 120 nm diameter.

Citation Download Citation

A. I. Vorobyova and E. A. Outkina "Display matrix of three-electrode active MDMDM elements", Proc. SPIE 4511, Advanced Display Technologies: Basic Studies of Problems in Information Display (FLOWERS 2000), (28 June 2001); https://doi.org/10.1117/12.431263

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