Photon scanning tunneling microscope and its application for inspection of Al2O3 waveguide film

Shi Pan; Jisong Wang; Shifa Wu; Guoshu Jian

doi:10.1117/12.445731

16 October 2001 Photon scanning tunneling microscope and its application for inspection of Al₂O₃ waveguide film

Shi Pan, Jisong Wang, Shifa Wu, Guoshu Jian

Proceedings Volume 4602, Semiconductor Optoelectronic Device Manufacturing and Applications; (2001) https://doi.org/10.1117/12.445731
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

Photon Scanning Tunneling Microscope (PSTM) is a newly developed technique. As a near-field optical microscope, it has the high resolution breaking through the diffraction limit and the advantage for easy to prepare the samples. PSTM is a useful tool in the inspection for many kinds of material film as the image containing the sample's information of topography and refractive index. We have developed a PSTM with resolution 5 to approximately 10 nm and scanning range 6 X 6 micrometer. By making use of two lasers, the false image caused by inclination of sample surface can be reduced. This PSTM is engaged in the inspection of Al₂O₃ optical waveguide film made using ion-beam-enhanced-deposition (IBED) technique at different substrate temperature. The PSTM images of the optical waveguide film are obtained and analyzed. The PSTM images show that as the increasing of the substrate temperature during the deposition, the sample images of refractive index and topography tend to smooth and even, consequently the scattering loss can be decreased. The conclusion is that by properly increasing the temperature of the substrate during the deposition period, the scattering loss can be decreased and the property of Al₂O₃ optical waveguide can be improved.

Citation Download Citation

Shi Pan, Jisong Wang, Shifa Wu, and Guoshu Jian "Photon scanning tunneling microscope and its application for inspection of Al₂O₃ waveguide film", Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); https://doi.org/10.1117/12.445731

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available