Study of improvement of imaging quality in project photolithography with amplitude phase compound filtering

Xunan Chen; Xiqiao Kang; Xiangang Luo; Jianping Shi

doi:10.1117/12.445749

16 October 2001 Study of improvement of imaging quality in project photolithography with amplitude phase compound filtering

Xunan Chen, Xiqiao Kang, Xiangang Luo, Jianping Shi

Author Affiliations +

Proceedings Volume 4602, Semiconductor Optoelectronic Device Manufacturing and Applications; (2001) https://doi.org/10.1117/12.445749
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

In accordance with the disadvantages of focus depth decrease caused by the large enough numerical aperture of the project photolithography imaging system and larger optical energy loss of amplitude filtering, the improvements in imaging resolution, focus depth and the availability of optical energy by means of amplitude phase compound filtering are studied in detail. The fact that corresponding optimal compound filters should be designed according to the different mask pattern designs has been proposed. The calculation analysis and experimental results show that amplitude phase compound filtering can improve the imaging resolution and focus depth of project photolithography by a big margin. At the same time the availability of optical energy can be improved and this is good for the improvement of production efficiency.

Citation Download Citation

Xunan Chen, Xiqiao Kang, Xiangang Luo, and Jianping Shi "Study of improvement of imaging quality in project photolithography with amplitude phase compound filtering", Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); https://doi.org/10.1117/12.445749

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available