Temperature effect of the pH-ISFET based on the sol-gel prepared SnO2 membrane

Jung Chuan Chou; Yii Fang Wang

doi:10.1117/12.445746

16 October 2001 Temperature effect of the pH-ISFET based on the sol-gel prepared SnO₂ membrane

Jung Chuan Chou, Yii Fang Wang

Proceedings Volume 4602, Semiconductor Optoelectronic Device Manufacturing and Applications; (2001) https://doi.org/10.1117/12.445746
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

The temperature effect is an important factor for the deviation of the pH-ISFET (ion sensitive field effect transistor). In this paper, we use the SnO₂ as the pH sensing membrane to investigate the temperature characteristics of the pH-ISFET. The SnO₂ membrane was prepared by the sol-gel technology. We use the tin (II) chloride dihydrate (SnCl₂(DOT)2H₂O) and ethanol to synthesize the sol of the SnO₂ thin film. For the sol-gel prepared SnO₂, the cost is lower than other methods.The Keithley 236 instrument was used to measure the I_DS - V_G curves of the SnO₂ gate pH-ISFET for different pH buffer solutions form ranging temperature 15 degree(s)C - 45 degree(s)C. According to the experimental results we can obtain the sensitivities for different operation temperatures. The sensitivity is increased with increasing temperature. The TCS (temperature coefficient of the sensitivity) is also calculated.

Citation Download Citation

Jung Chuan Chou and Yii Fang Wang "Temperature effect of the pH-ISFET based on the sol-gel prepared SnO₂ membrane", Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); https://doi.org/10.1117/12.445746

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available