Microstructure of oxygen-rich silicon oxynitride

Yaping Dan; Ruifeng Yue; Yan Wang; Yongzhao Yao; Li-Tian Liu

doi:10.1117/12.444560

16 October 2001 Microstructure of oxygen-rich silicon oxynitride

Yaping Dan, Ruifeng Yue, Yan Wang, Yongzhao Yao, Li-Tian Liu

Proceedings Volume 4603, Fiber Optics and Optoelectronics for Network Applications; (2001) https://doi.org/10.1117/12.444560
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

A detailed study is carried out on four oxygen-rich silicon oxynitride samples as an as-deposited one and other three same ones annealed at 600 degree(s), 750 degree(s) and 900 degree(s) respectively by Infrared spectroscopy (IR) and X-photoelectron spectroscopy (XPS). It is shown that the as-deposited sample consists of configurations as SiN_x (xequals1,2,3,4), O_nSi$4--n)-NH (nequals0,1,2,3), Si-O₄, Si-OH, N-OH, SiN-O and SiNequalsO. With the annealing temperature rising, other configurations diminish or disappear and thus the microstructure mainly consists of O₃Si-NH and Si-O₄. As the temperature steps higher to 900 degree(s), most of H is released, leading to the appearance of a great amount of O₃SiN- with a N dangling bonding, thus a sharp increase in the inner stress, and the reappearance of SiN-O, SiNequalsO and SiN configurations helps to compensate the inner stress.

Citation Download Citation

Yaping Dan, Ruifeng Yue, Yan Wang, Yongzhao Yao, and Li-Tian Liu "Microstructure of oxygen-rich silicon oxynitride", Proc. SPIE 4603, Fiber Optics and Optoelectronics for Network Applications, (16 October 2001); https://doi.org/10.1117/12.444560

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available