Thin film optical waveguide and 1micron polystyrene sphere array mixed system was fabricated and characterized experimentally. The attenuation coeffecients for 10, 5, 2 and 1micrometers 0 polystyrene micro-sphere linear and curvilinear array were measured to be 0.51, 0.48, 0.78, 0.98dB/sphere and 0.71, 0.67, 1.09, 1.30dB/sphere, respectively. In the MSF system for the 1micrometers 0 polystyrene micro-sphere linear and curvilinear array, the attenuation coefficients were measured to be 1.17 and 1.41dB/sphere. And the attenuation coefficients for linear and curvilinear optical thin film waveguides in the MSF system increased more than the waveguide without the sphere. In MSF waveguide at 1micrometers rule, evanescent wave interaction between optical thin film waveguide and polystyrene micro-sphere array was expected.
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