Optical low-coherent interference profilometer with improved performance

Yuri V. Chugui; I. V. Golubev; Yu. D. Makashev; Ye. V. Sysoev

doi:10.1117/12.455189

5 February 2002 Optical low-coherent interference profilometer with improved performance

Yuri V. Chugui, I. V. Golubev, Yu. D. Makashev, Ye. V. Sysoev

Proceedings Volume 4607, Selected Papers from Fifth International Conference on Correlation Optics; (2002) https://doi.org/10.1117/12.455189
Event: Fifth International Conference on Correlation Optics, 2001, Chernivsti, Ukraine

Abstract

Profile measurement of the surface defects (with the depth of dozens of microns), based on the low-coherent interferometry, is discussed in this paper. The major challenge for production of such devices is selecting interference fields, which are used to determine the isolines of the defect depth. A direct way to find low- contrast interference fields in a large dynamic light range appears to be an extremely difficult procedure. We propose an effective interference fields localization technique based on the reference wave phase modulation that against others provides high measurement accuracy and reliability. The reconstructed 3D-image and depth isoline map of 50 micrometers deep defect on the metallic surface of the fuel element are also presented. The system for surface profile measurement with the following characteristics has been developed: surface reconstruction error is less than 2 micrometers , surface reconstruction range on depth is up to 10 mm.

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Yuri V. Chugui, I. V. Golubev, Yu. D. Makashev, and Ye. V. Sysoev "Optical low-coherent interference profilometer with improved performance", Proc. SPIE 4607, Selected Papers from Fifth International Conference on Correlation Optics, (5 February 2002); https://doi.org/10.1117/12.455189

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KEYWORDS

CCD cameras

Interferometers

Profilometers

Interferometry

Phase modulation

3D metrology

Reliability

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