Nikon EPL tool development summary

Takaharu Miura; Tatsuo Sato; Masaya Miyazaki; Kazunari Hada; Yu Sato; Masateru Tokunaga

doi:10.1117/12.472330

1 July 2002 Nikon EPL tool development summary

Takaharu Miura, Tatsuo Sato, Masaya Miyazaki, Kazunari Hada, Yu Sato, Masateru Tokunaga

Proceedings Volume 4688, Emerging Lithographic Technologies VI; (2002) https://doi.org/10.1117/12.472330
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

In the development of Electron Beam Projection Lithography Tool (EPL), one of the most important tasks is to develop the high-speed vacuum stage system and reliable vacuum body system. Nikon has a long history of over 22 years in precision stage development for its Optical Lithography Tools as well as over 10 years in EB instrument development such as EB 60 with NTT. Recently, lithography stages have been developed based on air bearing and linear motor technologies. It is desirable and of minimum risk to utilize those technologies for the EPL system in order to shorten total time period of development, but the requirements for the EB stage and body are much different from their optical counterparts and much more difficult. In this paper, development and implementation of EPL vacuum stage system, vacuum body system, vacuum loader system, and control system are discussed and over viewed.

Citation Download Citation

Takaharu Miura, Tatsuo Sato, Masaya Miyazaki, Kazunari Hada, Yu Sato, and Masateru Tokunaga "Nikon EPL tool development summary", Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); https://doi.org/10.1117/12.472330

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