Parameter extraction for 157-nm photoresists

Joseph J. Bendik; Will Conley; Daniel A. Miller; Paul Zimmerman; Kim R. Dean; John S. Petersen; Jeff D. Byers

doi:10.1117/12.474174

24 July 2002 Parameter extraction for 157-nm photoresists

Joseph J. Bendik, Will Conley, Daniel A. Miller, Paul Zimmerman, Kim R. Dean, John S. Petersen, Jeff D. Byers

Proceedings Volume 4690, Advances in Resist Technology and Processing XIX; (2002) https://doi.org/10.1117/12.474174
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

The design of 157nm photoresist is a daunting task since air, water, and most organic compounds are opaque at this wavelength. Spectroscopic studies led to the observation that fluorinated hydrocarbons improve the transparency of 157nm resist materials rather dramatically. These fluorinated resists have quickly become the prominent material platform for a variety of research activities. Regardless of wavelength, developing a practical photoresist material is always challenging; the added difficulties associated with 157nm radiation complicates the overall design problem and severely limits the choice of material classes to work with. This paper will discuss our 157nm simulation and parameter extraction efforts that have been completed over the past few months at International SEMATECH. During the past year we have developed the methodologies and practical test methods that are needed to study the lithographic behavior of 157nm resist systems. Our work is based on procedures in the open literature and augmented by internal research.

Citation Download Citation

Joseph J. Bendik, Will Conley, Daniel A. Miller, Paul Zimmerman, Kim R. Dean, John S. Petersen, and Jeff D. Byers "Parameter extraction for 157-nm photoresists", Proc. SPIE 4690, Advances in Resist Technology and Processing XIX, (24 July 2002); https://doi.org/10.1117/12.474174

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available