Development of a MEMS-rate sensor with PZT actuation and sensing

Christopher M. Royle; Colin H.J. Fox

doi:10.1117/12.475018

11 July 2002 Development of a MEMS-rate sensor with PZT actuation and sensing

Christopher M. Royle, Colin H.J. Fox

Proceedings Volume 4700, Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology; (2002) https://doi.org/10.1117/12.475018
Event: SPIE's 9th Annual International Symposium on Smart Structures and Materials, 2002, San Diego, California, United States

Abstract

This paper relates to the development of a novel rate sensor for a wide range of potential applications in the automotive field, amongst others. The sensor is based on the dynamic behavior of an active, vibrating silicon structure that uses thin-film piezoelectric material for actuation and sensing functions, and can be manufactured using silicon micro-machining techniques. The use of piezo-electric material for drive and pickoff offers potentially significant advantages over electrostatic/capacitive means in terms of achievable actuation forces and simplicity of structural design. This paper gives an overview of the design and analysis of a prototype sensor. The design concept is described and a low-order mathematical model, incorporating the inertial behavior of the structure and the interaction between the silicon structure and the piezo-drives and pickoffs is presented. This model allows the basic sensitivity of the sensor to be quantified. The design of a prototype sensor is then described. Some preliminary test results are presented, illustrating the feasibility of the concept.

Citation Download Citation

Christopher M. Royle and Colin H.J. Fox "Development of a MEMS-rate sensor with PZT actuation and sensing", Proc. SPIE 4700, Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology, (11 July 2002); https://doi.org/10.1117/12.475018

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KEYWORDS

Ferroelectric materials

Sensors

Silicon

Prototyping

Gyroscopes

Manufacturing

Actuators

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