Paper
15 March 2002 Wireless temperature measurement utilizing the temperature-frequency character of crystal
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Abstract
Usually, the situation should be avoided that the resonant frequency of crystal changes with temperature. However because the precision of the crystal resonance frequency is quite high, the temperature measurement can be realized by utilizing the relation between the resonant frequency and temperature. Its principle, measuring method are discussed and the experimental results are demonstrated in this paper.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wenxiang Chen "Wireless temperature measurement utilizing the temperature-frequency character of crystal", Proc. SPIE 4710, Thermosense XXIV, (15 March 2002); https://doi.org/10.1117/12.459627
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KEYWORDS
Crystals

Temperature metrology

Head

Temperature sensors

Semiconducting wafers

Antennas

Signal detection

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