Large amplitude effects on the resonant frequency of electrostatically driven microresonators: theory and experimental validation

Hua Chen; Olivier Francais; Olivier Gigan; Olivier Robert

doi:10.1117/12.469407

14 November 2002 Large amplitude effects on the resonant frequency of electrostatically driven microresonators: theory and experimental validation

Hua Chen, Olivier Francais, Olivier Gigan, Olivier Robert

Author Affiliations +

Proceedings Volume 4935, Smart Structures, Devices, and Systems; (2002) https://doi.org/10.1117/12.469407
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

This paper is dedicated to a global study of large amplitude effects of electrostatically driven microresonators. Special attention is given to the electrostatic soft spring effect. A theoretical description of the amplitude-induced soft spring effect is given to an electrostatically driven parallel-plate type resonator. A coefficient representing the beam mode shape is introduced, for a clamped-clamped beam resonator. Electrostatic soft spring effect is combined with hard spring effect to highlight the possibility of obtaining a design criteria for compensating the two effects. Hysterisis due to nonlinear forces are addressed, and a critical amplitude is given. A numeric simulator based on MATLAB/Simulink is developed to highlight the electrostatic soft spring effect. Three prototypes with different geometries, which represent each a typical case, are fabricated on an SOI wafer. The design criteria has been compared with measurements obtained with prototypes and experimental results showed good agreements with theory and simulations.

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Hua Chen, Olivier Francais, Olivier Gigan, and Olivier Robert "Large amplitude effects on the resonant frequency of electrostatically driven microresonators: theory and experimental validation", Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); https://doi.org/10.1117/12.469407

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