Particularities of IR-radiation absorbing in fine polyimide structures and microbolometer detector on their base

A. A. Zhukov; A. E. Zdobnikov; S. N. Klemin; Victor V. Tarasov; L. A. Filatov; Yu. S. Chetverov

doi:10.1117/12.498042

1 April 2003 Particularities of IR-radiation absorbing in fine polyimide structures and microbolometer detector on their base

A. A. Zhukov, A. E. Zdobnikov, S. N. Klemin, Victor V. Tarasov, L. A. Filatov, Yu. S. Chetverov

Author Affiliations +

Proceedings Volume 5025, Fifth Seminar on Problems of Theoretical and Applied Electron and Ion Optics; (2003) https://doi.org/10.1117/12.498042
Event: Fifth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2001, Moscow, Russian Federation

Abstract

The absorption of IR-radiation 200-4000 cm^-1 range of 0,65-1,9 micron thick polyimide thin-films with such functional coverings as titanium, silicon nitride, aluminium was investigated. The 1,3-1,4 micron thick polyimide structure have 85% absorption of IR-radiation of 720-1250 cm^-1 range. On the base of the developed polyimide thin-film technology linear micro bolometric array detectors was fabricated and investigated. Calculated value of the linear micro bolometer array detectivity is 4×10⁷ cm Hz^1/2W^-1.

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A. A. Zhukov, A. E. Zdobnikov, S. N. Klemin, Victor V. Tarasov, L. A. Filatov, and Yu. S. Chetverov "Particularities of IR-radiation absorbing in fine polyimide structures and microbolometer detector on their base", Proc. SPIE 5025, Fifth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, (1 April 2003); https://doi.org/10.1117/12.498042

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