Dynamic characterization of SiO<sub>2</sub>-Au microcantilevers using Michelson interferometer

Guillaume Marinier; Stefan Dilhaire; Luis David Patino Lopez; Mohamed Benzohra

doi:10.1117/12.498827

24 April 2003 Dynamic characterization of SiO₂-Au microcantilevers using Michelson interferometer

Guillaume Marinier, Stefan Dilhaire, Luis David Patino Lopez, Mohamed Benzohra

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.498827
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

A method of characterization without contact of passive microstructures is presented in this paper. Samples of different SiO₂-Au microcantilevers (lengths from 100μm to 300μm, width 40μm, thickness 1.1μm) were studied by means of a Michelson interferometer. Two measurement techniques were employed, one by impulse response and the other by synchronous detection, in order to obtain the microcantilevers Eigen resonant spectrum and thus to determine their first three resonant frequencies. The knowledge of these frequencies makes possible the determination of the Young’s modulus of material and thus simplifies the modeling of the microsystem.

Citation Download Citation

Guillaume Marinier, Stefan Dilhaire, Luis David Patino Lopez, and Mohamed Benzohra "Dynamic characterization of SiO₂-Au microcantilevers using Michelson interferometer", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.498827

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