New capabilities of the CEM-TEK 1200 interferometric comparator for calibrating long gauges, step gauges, and now line scales

Emilio Prieto; Joaquin Rodriguez

doi:10.1117/12.508135

20 November 2003 New capabilities of the CEM-TEK 1200 interferometric comparator for calibrating long gauges, step gauges, and now line scales

Emilio Prieto, Joaquin Rodriguez

Author Affiliations +

Proceedings Volume 5190, Recent Developments in Traceable Dimensional Measurements II; (2003) https://doi.org/10.1117/12.508135
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Using of length materialized standards is necessary to calibrate CMMs according to ISO 10360 written standard. CEM calibrate this kind of standards till 1200 mm on its fully automatized CEM-TEK 1200 interferometric comparator, obtaining a repeatability of less than 40 nm. It conducts to an uncertainty U = Q [70;0.4 L/mm] nm when calibrating long gauges and to U = Q [0.1;0.4E-3 L/mm] µm for step gauges, both for a coverage factor k = 2, the last being the smallest CMC value approved by RMOs and BIPM among those offered by NMIs calibrating step gauges. It permits to reduce considerably the uncertainty linked to the process of verifying CMMs performance because the low uncertainty associated to the step calibration. Recently this comparator has been improved to obtain for steps an uncertainty closer to that of the long gauges, and updated to calibrate automatically high precision line scales by using optical methods, combining CCD, microscopy and home made software including image analysis and edge recognition. So, this equipment is probably the most universal one in the world, permitting the calibration of many different standards (long gauges, end bars, step gauges and line scales), with a repeatability of less than 40 nm and expanded uncertainties lower than 0.1 μm. On this paper CEM present some of the results obtained in international key comparisons.

Citation Download Citation

Emilio Prieto and Joaquin Rodriguez "New capabilities of the CEM-TEK 1200 interferometric comparator for calibrating long gauges, step gauges, and now line scales", Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); https://doi.org/10.1117/12.508135

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