Novel high-precision optical thin film monitor

Cheng Zhang; Weiqiang Lu; Yongtian Wang

doi:10.1117/12.521691

2 September 2003 Novel high-precision optical thin film monitor

Cheng Zhang, Weiqiang Lu, Yongtian Wang

Proceedings Volume 5253, Fifth International Symposium on Instrumentation and Control Technology; (2003) https://doi.org/10.1117/12.521691
Event: Fifth International Symposium on Instrumentation and Control Technology, 2003, Beijing, China

Abstract

High-precision optical thin-film deposition monitor is a key technology for modern optical thin-film fabrication. A new monitor is developed based on double beam one lock-in amplifier. It allows the precise cut off of layers through the deposition. Experimental results show that the monitor can be used in a high-precision, fully automatic control optical thin-film deposition system.

Citation Download Citation

Cheng Zhang, Weiqiang Lu, and Yongtian Wang "Novel high-precision optical thin film monitor", Proc. SPIE 5253, Fifth International Symposium on Instrumentation and Control Technology, (2 September 2003); https://doi.org/10.1117/12.521691

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